A Breakthrough Technology in Laser Microscopy

February 06, 2018



Introducing the latest technology in microscopy, the OLS5000 takes magnification to a whole new level with its most powerful laser technology and outperforms its predecessor with 4x faster image acquisition.

Introducing the latest technology in microscopy, the Lext OLS5000 takes magnification to a whole new level with its most powerful laser technology and outperforms its predecessor with 4x faster image acquisition.

High-resolution, precise imaging

The Lext OLS5000 precisely measures shape and surface roughness at the submicron level and delivers a significant boost to productivity.

With the capability to make accurate 3D measurements on a wide rage pf sample types, the system delivers reliable data for quality assurance and process control. The 405 nm violet laser and dedicated high-NA objectives make it possible to capture fine interferometers, or red laser-based microscopes are unable to detect.

Get answers quickly: high-speed scanning


The microscope's scanning algorithm delivers improved data quality and greater spead to reduce the scan time and streamline your workflow, resulting in better productivity.

The OLS5000 microscope incorporates a PEAK algorithm for 3D data construction. This algorithm provides highly accurate data from low to high magnification and reduces data acquisition time.

When measuring the shape of steps on a sample containing near-vertical planes, such as an electronic component or MEMS, the data acquisition time can be reduced by limiting the Z-direction scanning range.

Work efficiently: Simple operating procedures


The system features automatic data capture, so difficult setting adjustments are no longer necessary. Even users with minimal training can still obtain accurate results.

The simple analysis function measures the step, line width, surface roughness, area, and volume only in the specified measurement areas. The causes of variance in the measurement results, such as the edge position and the threshold of the reference planes in volume analysis, are automatically detected so that the measurement results are stable and not affected by the operator’s skill level.

Smart Judge processing automatically eliminates measurement noise without compromising data accuracy, while Smart Leveling detects the main horizontal plane (reference plane) at the zero height position. Activate both with a single click.

All of the operations and procedures included in a report can be saved as a template. Using this template when repeating the same measurements makes it possible to obtain an analysis report on the next set of data that applies the same procedures. The ability to specify processing operations and measuring points without the operator’s intervention enables fast, precise analysis with minimal variance.

Flexible: accomodates larger samples

The extension frame for the OLS5000 microscope accommodates samples with a height of up to 210 mm, while the ultra-long working distance objective facilitates measurement of concavities as deep as 25 mm. In both cases, all you have to do is place the sample on the stage.

Olympus offers a line of 10x to 100x objectives capable of reducing aberrations at a scale of 405 nm. Low power and long working distance objectives are also available in this series. The measurement performance of all dedicated LEXT objectives is guaranteed, so you can select the one best suited to the sample you're observing.

Our line of dedicated LEXT objectives include a 10x objective and long working distance objectives, enhancing the microscope's measurement performance.

to learn more about the Lext OLS5000 click here