The microscope's scanning algorithm delivers improved data quality and greater speed to reduce the scan time and streamline your workflow, resulting in better productivity.
The OLS5000 microscope incorporates a PEAK algorithm for 3D data construction. This algorithm provides highly accurate data from low to high magnifications and reduces the data acquisition time.
When measuring the shape of steps on a sample containing near-vertical planes, such as an electronic component or MEMS, the data acquisition time can be reduced by limiting the Z-direction scanning range. A 700 ?m step can be measured in about 15 seconds without degrading the accuracy (when the MPLAPON20x objective is used).
Other speed-enhancing technologies
Work efficiently: simple operating procedures
The system features automatic data capture, so difficult setting adjustments are no longer necessary. Even users with minimal training can still obtain accurate results.
Simplify the measurement area
00:00 | 00:19 The simple analysis function measures the step, line width, surface roughness, area, and volume only in the specified measurement areas. The causes of variance in the measurement results, such as the edge position and the threshold of the reference planes in volume analysis, are automatically detected so that the measurement results are stable and not affected by the operator’s skill level.
Compatible with samples up to 210 mm tall
The extension frame for the OLS5000 microscope accommodates samples with a height of up to 210 mm, while the ultra-long working distance objective facilitates measurement of concavities as deep as 25 mm.
In both cases, all you have to do is place the sample on the stage.
OLS5000-SAF Setup Example
PC & Control unit
|Total magnification||54x - 17,280x|
|Field of view||16um - 5,120um|
|Measurement principle||Optical system||Reflection-type confocal laser scanning laser microscope Reflection-type confocal laser scanning laser-DIC microscope Color Color-DIC|
|Light receiving element||Laser: Photomultiplier (2ch) Color: CMOS color camera|
|Height measurement||Display resolution||0.5nm|
|Dynamic range||16 bits|
|Repeatability ?n-1*1 *2 *5||5X?0.45?m, 10X?0.1?m, 20X : 0.03?m, 50X : 0.012?m, 100X : 0.012?m|
|Accuracy *1 *3 *5||0.15+L/100?m (L:Measuring length[?m])|
|Accuracy for stitched image *1 *3 *5||10X?5.0+L/100 ?m, 20X or higher : 1.0+L/100 ?m (L: Stitching length [?m])|
|Measurement noise (Sq noise) *1 *4 *5||1nm|
|Width measurement||Display resolution||1nm|
|Repeatability 3?n-1 *1 *2 *5||5X : 0.4 ?m, 10X : 0.2 ?m, 20x : 0.05 ?m, 50X : 0.04 ?m, 100X : 0.02 ?m|
|Accuracy *1 *3 *5||Measurement value +/- 1.5%|
|Accuracy for stitched image *1 *3 *5||10X : 24+0.5L ?m, 20X : 15+0.5L ?m, 50X : 9+0.5L ?m, 100X : 7+0.5L ?m (L: Stitching length [mm])|
|Maximum number of measuring points in a single measurement||4096 x 4096 pixel|
|Maximum number of measuring points||36 Mpixel|
|XY stage configuration||Length measurement module||•||NA||NA||•||NA|
|Operating range||100 x 100mm Motorized||100 x 100mm Manual||300 x 300 mm Motorized||100 x 100mm Motorized||100 x 100mm Manual|
|Maximum sample height||100mm||30mm||37mm||210mm||140mm|
|Laser light source||Wavelength||405nm|
|Maximum output||0.95 mW|
|Laser class||Class 2 (IEC60825-1:2007, IEC60825-1:2014)|
|Color light source||White LED|
|Electrical power||240 W||240 W||278 W||240 W||240 W|
|Mass||Microscope body||Approx. 31 kg||Approx. 32 kg||Approx. 50 kg||Approx. 43 kg||Approx. 44 kg|
|Control box||Approx. 12 kg|
|Series||Model||Numerical Aperture(NA)||Working Distance(WD)(mm)|
|UIS2 objective lens||MPLFLN2.5x||0.08||10.7|
|LEXT dedicated objective lens (10X)||MPLFLN10xLEXT||0.3||10.4|
|LEXT dedicated objective lens (High performance type)||MPLAPON20xLEXT||0.6||1|
|LEXT dedicated objective lens (Long working distance type)||LMPLFLN20xLEXT||0.45||6.5|
|Super long working distance lens||SLMPLN20x||0.25||25|
|Long working distance for LCD lens||LCPLFLN20xLCD||0.45||8.3-7.4|
|Standard software||OLS50-BSW||Data acquisition app|
|Motorized stage package application*1||OLS50-S-MSP|
|Advanced analysis application*2||OLS50-S-AA|
|Film thickness measurement application||OLS50-S-FT|
|Auto edge measurement application||OLS50-S-ED|
|Particle analysis application||OLS50-S-PA|
|Multi-data analysis application||OLS50-S-MA|
|Sphere/cylinder surface angle analysis application||OLS50-S-SA|
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