Measuring Microscope

Olympus STM7

Measuring Microscope
Observation Performance Refined Through Years Of Microscope Development
Brightfield Image
Darkfield Image
DIC Image
POL Image
The STM7 series uses the same UIS2 infinity-corrected optical system used in state-of-the-art optical microscopes. As a result, observed images have high resolution and high contrast, with aberration thoroughly eliminated to help ensure highly accurate measurement in minute detail.
Measurement Reliability Enhanced With A Stage-Mounting Plate Crafted From Stone
STM7-LF FEM Analysis
To provide further assurance of measurement accuracy, the STM7 series uses a highly durable, vibration-resistant frame with a granite surface plate. As a result of this stability, measurements can be taken at sub-micron-levels while ensuring minimal error.
Continuing To Provide User-friendly, High-Precision, 3-axis Measurement As A Pioneer Of Height Measu

Reflective Active, Confocal Autofocus System Optical Path

As modern manufacturing technology becomes increasingly miniaturized and precise, highly accurate measurements are even more essential—not only along the horizontal XY axes, but also along the Z-axis. Olympus has responded to such needs by being the fi rst to realize an autofocus system for measuring microscopes by means of the reflective active, confocal method.

Dependable Quality Based On A Strict Traceability System

Measuring Microscopes Traceability System

The accuracy of Olympus’ measuring microscopes is controlled by a strict traceability system and Olympus even offers traceable calibration at the time of installation.

The STM7 Was Designed With Emphasis On Ease Of Use
STM7-CS100 100mm X 100mm
STM7-CS200 200 Mm X 200 Mm
STM7-CS300 300 Mm X 300 Mm
STM7-CS50 50mm X 50mm

Offering Stages to Fit the Sample Size at Hand

Common Problems

STM7 Solutions

  • Short measurement stroke precludes the measurement of larger samples.
  • Sample rotation required to compensate for shorter Y than X-axis coverage during measurement is time inefficient. Until now, large stages have offered a sufficient measurement coverage on the X-axis, but only less coverage on the Y-axis.
  • Due to the narrow measurement range, it is impossible to line up large numbers of samples on the stage for measurement at once.
  • Four types of stages are available, each with a unique square measurement stroke (choose from 50 mm x 50 mm, 100 mm x 100 mm, 200 mm x 200 mm, and 300 mm x 300 mm). From small to large size samples, there is a stage that fits the sample being measured.
  • A clutch system enables rapid switching between coarse and fine movements. Thanks to this switching function, the stage can also be moved rapidly along the X- and Y-axes, and freely across the XY plane.
  • The 300 mm square length stage enables the same measurement stroke to apply to both the X and Y-axes, which means it can be used to measure large samples, such as 300 mm wafers and printed circuit boards without changing their orientation.
Use The Same Microscope For Both Low- And High-Magnification Observations

Offering Stages to Fit the Sample Size at Hand

Common Problems

STM7 Solutions

  • Most conventional measuring microscopes only accept a measuring objective or metallurgical objective, and so are unable to meet the requirements for a wide variety of observations.
  • The STM7 accepts both a metallurgical objective and a measuring objective by exchanging a revolving nosepiece with a measuring objective adapter. This means that the STM7 combines both metallurgical optics and measuring optics in one microscope. In this way, the STM7 series satisfi es a range of needs, no matter whether measuring a wide area or tiny region, measuring the size of differences betwe en levels, or assisting the user in deciding on the best observation method to choose.

Measuring Objectives

Because the measuring objectives have an extremely long working distance, they provide confidence when focusing on samples with large peaks and troughs while reducing worries of the objective coming into contact with the sample. Furthermore, their low-magnifi cation capability enables wide areas to be observed in a single view.

Metallurgical Objectives

Brightfield image

Darkfield image

Metallurgical objectives enable high-magnifi cation, highresolution observation capability comparable to that of optical microscopes. What’s more, these objectives can be used not only for brightfield, but also for darkfield and DIC observation.

Manual And Motorized Focusing Model Options

The STM7 Line Includes both Manual and Motorized Focus Options
Focus control is available with either manual or motorized operation. Choose the model that addresses your needs in terms of samples and measurement content, regardless of stage size—with all frames incorporating a linear scale for the Z-axis that enables 3-axis measurement.

Manual Z-axis Focus Models

Manual Z-axis focus models offer excellent cost performance—with familiar handle operation for rapid vertical movement that offers convenience for users who needs to measure samples with variety of heights.

Motorized Z-axis Focus Models

Operability is improved and handling fatigue is reduced for focus and height measurements when using the motorized focus unit. The coaxial knobs for coarse and fine movement offer a feeling similar to manual operation, while the models can also be equipped with an autofocus unit.

A Revolutionary Control Unit Refines Measuring Microscope Usability

Common Problems

STM7 Solutions

  • Additional functions require additional operational units. Operators can’t always locate the corresponding unit quickly, which significantly reduces measurement efficiency.
  • Numerous operational units and their power supplies around the main unit occupy valuable working space.
  • Controllers
    With the STM7 series, a single controller makes it possible to perform virtually all measuring microscope operations, including use of readout reset, illumination control, focusing, and autofocus. For effi ciency and convenience, the unit can be placed wherever you wish and operated easily with one hand.

Control Box

For Manual Z-axis Focusing Models:
STM7HS Hand Switch

For Motorized Z-axis Focusing Models:
STM7-MCZ Focus Controller

The power supply and transmission for each unit are combined in a single control box. This preserves maximal workspace even when a range of optional functions, such as the focus navigator, are added.

Automatic Light Intensity Adjustment Greatly Improves The Efficiency Of Observation And Measurement

Common Problems

STM7 Solutions

  • Analog volume adjustment used by conventional measuring microscopes does not enable the quantitative assessment of light intensity, which can lead to variability in measured values as light intensity changes.
  • With conventional measuring microscopes, light intensity may need to be adjusted every time the objective is switched—making for an inefficient workflow.
  • Close Control through a Quantitative Digital Display of Light Intensity Values

    The STM7 series provides a quantitative digital display of light intensity—enabling observations to always be made under consistent illumination conditions.

Light Intensity Manager Eliminates the Need for Manual Adjustment
Light intensity manager can be used with the coded revolving nosepiece configuration. The coded revolving nosepiece automatically detects the switching of objectives. This allows the illumination method and light intensity to be registered for each objective, and adjusted automatically during measurements when the objective is switched. Now there is no need to manually adjust light intensity, which used to be required with every switch between magnifications.

5xIntensity 50

20xIntensity 70

100xIntensity 120

A Detachable Digital Read Out For Preferred Location Enables Swift, Convenient Checking Of Measureme
Digital Readout Attached To The Frame
Digital Readout Placed On A Desk
Common Problems
  • The need to check the operation status of equipment, such as illumination, or measured values on individual units makes overall operation cumbersome.
STM7 Solutions

Digital Indicator Enables the Current Operation Status to be Verified Visually
The indicator displays the device status and settings. The minimum X, Y, and Z-axis values can be switched between 0.1 ?m and 1 ?m, and the display units can be switched between mm, ?m, inches and mil.

Detachable Digital Readout Allows for Individual Preference and Placement
Whether attached to the frame or a desk, the placement of the detachable digital readout is up to the individual user. While standing to take measurements, it can be placed on the side of the frame at almost the same height as the site of observation for an exceptional and easy view. When operating from a sitting position, such as observation or measurements on a monitor via a digital camera or when using the motorized Z-axis focusing model, simply place the digital readout and hand controller on the desk.

Automated Focusing System Provides Superior Repeatability
Achieve Faster, Simpler, More Accurate Height Measurement

Visual Height Measurement

Common Problems
  • When doing visual measurement, variations can arise in the height measurements between different operators. Furthermore, this measurement method is time-consuming and inefficient.
STM7 Solutions

Simple and Highly-Precise Focusing System with Superior Repeatability
The Olympus’ focus navigator delivers highly reproducible height measurement by projecting a pattern within the fi eld of view and identifying vertical deviations. Slight errors can occur in height measurements taken with normal visual observation, even when focus appears to be sharp. The focus navigator, however, enables measurements to be made simply by matching up the marks—thereby reducing operator subjectivity in measurement results.

Focus Navigator

Below Focus

In Focus

Above Focus

Autofocus Advantage For Fast And Highly Accurate Height Measurement

Common Problems

STM7 Solutions

  • During visual measurement, the results of height measurement can vary between different operators
  • Manual height measurement requires the operator to repeatedly move the stage and adjust the focus with the handle, making measurement time-consuming and inefficient.
  • Focusing on minute objects, such as bonding wires, is difficult.
  • Dedicated Autofocus Unit: Outstanding Reproducibility and Focusing Speed
    The STM7 dedicated autofocus unit allows highly accurate height measurements to be made with minimal time, regardless of the level of operator experience. Use of the refl ective active, confocal method provides a stable focal point independent of surface roughness or a slanting sample surface, while the small laser diameter enables the use of autofocus, even on minute objects, such as bonding wires.

One-Shot Mode
Instantaneously takes autofocus from a roughly focused state to sharp focus located at the center of the field of view.

System For Achieving More Advanced Measurement

Measurement Support System

The ability to clearly and easily see the output display component of measuring microscopes is essential. That is why the new Olympus measuring software has been created, helping to deliver complex measurements with greater accuracy. The software also enables the use of digital cameras.

Small frame Middle frame Large frame
Optical System UIS2 Optical System (Infinity-corrected)
Microscope Frame Observation Method BF/DF/DIC/KPO*1
Reflected/Transmitted Reflected/Transmitted
Illumination System White: for Reflected Illumination, Green: for Transmitted Illumination with Max. Power Consumption: 10 W
Focus Motorized/Manual Manual [Manual Type]
Motorized [Motorized Type]
Stroke 175 mm 145 mm*2
FOCUS button: Coarse movement speed 8 mm/sec [Motorized Type]
Fine Focasing Speed (Variable) 800 µm/400 µm/200 µm/50 µm (Full Rotation of Knob) 4 Steps [Motorized Type]
Maximum measurable height 175 mm*3, 120 mm*4 145 mm*3, 90 mm*4
Objectives Measuring Objectives/Metallurgical Objectives
Observation tube Erect image monocular tube, erect image trinocular tube (100:0/0:100)
Stage Stroke 50(X)x50(Y)mm 200(X)x200(Y)mm 300(X)x300(Y)mm
Measuring Accuracy 50 mm Stroke:(3+L/50)µm (3+4L/200)µm (3+6L/300)µm
100 mm Stroke:(3+2L/100)µm
Counter Display Number of axes Three
Unit mm/?m/inch/mil
Minimum resolution 0.1?m
Dimensions [Manual Type] 466(W)x583(D)x651(H)mm 606(W)x762(D)x651(H)mm 804(W)x1024(D)x686(H)mm
[Motorized Type] 466(W)x583(D)x811(H)mm 606(W)x762(D)x811(H)mm 804(W)x1024(D)x844(H)mm
Weight [Manual Type] 84kg(Approx.) 152kg(Approx.) 277kg(Approx.)
[Motorized Type] 92kg(Approx.) 159kg(Approx.) 284kg(Approx.)
Remark *1: Simple Polarized Light Observation
*2: When using the large frame STM7-LF/STM7-LFA, a specimen whose height is 100 mm or less can be placed at the position backward from the light axis by 180 mm or more.
*3: With Objective Lenses for Metallurgical Microscope
*4: With Objective Lenses for Measuring Microscope
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