|
OLYMPUS WAFER LOADERS |
|
AL120 ULTRA THIN WAFER LOADER SYSTEM |
|
Every thin wafers can be loaded and set for micro and macro inspections. There are advanced safety functions, such as 3-sensor continuous monitoring of wafer conditions, and three loading speed selection (Fast, Middle, Slow). 25 wafers can be accommodated in one cassette for thin wafer loading. The ability to preset many thickness allows wafers with different thicknesses to be loaded instantly. |
|
Wafer on back macro arm with 360-degree tilting angle (Simulation) |
|
A large-size LCD display unit newly employed |
|
Olympus succeeds in transfer of down to 90µm thick wafer in 200mm diameter |
|
AL120 UPTO 300mm DIAMETER WAFER LOADER SYSTEM |
|
With attention to wafer safety, the AL120-12 is committed to enhancing the essence of operations in back end process and providing improving yield and productivity improvement. |
|
· Easy operation · 300mm wafer FOUP/FOSB compatible · The highest system reliability and inherited system performance · Dedicated macro illumination (optional) |
|
We are Metrology. We are Microscope. |