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DYNATECH WAFER TAPE LAMINATION SYSTEM |
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This equipment is designed to laminate wafer B/G protective tape to the wafer pattern surface in order to protect wafer circuit from wafer breakage during back-grinding process. |
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Features:
· Capable of Bumping wafer by special bond roller · 8-12 inch wafer capability · Precision edge cutting for optimum wafer back-grinding · High accuracy lamination by pre-aligner · Air bubble free lamination · No tape burr and tail after lamination · Adjustable cutting blade angle · Adjustable cutting force tension · Special air blow & suction cleaner for particle free lamination · Minimum tape consumption · Easy tape setting by one touch locker · High precise robotic handler · Compact design suitable for small space · Quick and easy conversion for different size wafer |


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We are Metrology. We are Microscope. |
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Applicable wafer size |
8 & 12 inch |
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Applicable frame size |
8 & 12 inch |
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Applicable tape |
Normal and UV tape |
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Control method |
PLC control |
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Display method |
GP touch screen |
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UPH |
8 inch(V type)/65 sheets |
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8 inch(Flat type)/60 sheets |
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12 inch(Flat type)/45 sheets |
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Alignment accuracy |
+/-0.5 mm, +/-0.5 degree |
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Wafer cassette |
Dual loading |
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Chuck heat control |
Up to 70˚C |
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Color |
Ivory |
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ESD control |
Controlled below 100V from 1000V within 10 seconds |
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Blade cycle time |
Min 500 cut/blade |
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Cutter blade heat control |
0~150˚C |
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Dimension of machine |
1500(d) x 1320(w) x 1750(h) mm |
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Weight of machine |
650 Kgs |
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Electric power |
AC110/220VAC, Single phase, 50/60Hz |
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Air supply |
5~6kgs/cm² |
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<Option> |
Host communication(GEM,SECS I,II,HSMS) |