DYNATECH UV IRRADIATOR SYSTEM

DT-AUV1200 is designed to perform UV Curing process so that operator can run this equipment safely and comfortably automatically by a microprocessor based on programmable controller.

Features:

 

· No UV light leaking from chamber

· UV curing monitoring by CCD camera

· 6-12 inch wafer capability

· Uniform UV curing to wafer

· Auto detection of vacant slot in wafer cassette

· High productivity

· Long-lasting UV lamp (More than 1000hr)

· Adjustable lamp intensity

· Adjustable exposed time

· Easy and efficient maintenance and conversion

· Safety door lock system

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