OLYMPUS SEMICONDUCTOR MICROSCOPES

The highest efficiency for all our customers—that’s the commitment underlying the launch of the MX61/MX61L. MX61 accepts up to 200mm samples while MX61L  accommodates up to 300mm samples.

More efficient inspections throughout Industry: streamlined  operation for faster, more comprehensive results.

 

· Agile stage movement and coarse/fine movement interchange

· Repositioned optical controls for smoother performance

· Anti-static treatment prevents dust contaminating the sample

· SEMI S2/S8 compliance enhances safety and ergonomics

Back to Olympus Main Page

High-magnification DUV real-time observation just by adding a new module to a new or existing Olympus Microscope.

DUV Observation

Visible Light Observation

We are Metrology. We are Microscope.

MX61A is a top-end model in the semiconductor inspection microscope MX series. The MX61A has further advanced automation and motorization of microscopic observations, and achieved a new dimension in flexibility and expandability to meet specific inspection and analysis needs of users as a Dual-Engine concept.