*Olympus

MX61/MX61L

mx61l

MX61/MX61L

 

Clear Observation Images with UIS2 Objective Lens

UIS2 objective lenses are selectable from a wide range line-up of various magnification assortments and special applications according to the requirements. Also available is the high performance that has achieved high quality images with wave front aberration control and the fidelity of color neutral to a specimen in visual observation up to digital imaging.

Microscope Image
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Brightfield Darkfield DIC Fluorescence

 


MPLAPON Series

MPLAPON
This is a Plan Apochromat objective lens series for brightfield observation with chromatic aberration corrected at the highest level. This series guarantees optical performance (wavefront aberration correction) at a Strehl ratio of 95% or more and is also compatible with the AF unit (Olympus U-AFA2M).

 


MPLFLN/MPLFLN-BD Series

This is a series of universal semiapochromatic objective lenses featuring high-degree corrections for chromatic aberrations. The high performance is available in fluorescence, differential interference contrast, and simple polarized observations not to mention brightfield observation. Use the BD series for the purpose of brightfield/darkfield observation.

 


MPLFLN-BDP Series

This is a series of universal objective lenses featuring high-level performance available especially in polarized and differential interference contrast observations.

 


LMPLFLN/LMPLFLN-BD Series

This is a series of long working distance plan semiapochromatic objective lenses featuring superb corrections for chromatic aberrations. A long working distance is effectively available for a specimen with steps and for keeping the objective lens from bumping against a specimen under observation. Pupil position is unified for magnifications from 5x through 100x, eliminating the need for switching of the DIC prism otherwise necessary when switching objective lenses. Use the BD series for the purpose of brightfield/darkfield observation.

 


MPLN/MPLN-BD Series

This is a series of plan apochromatic objective lenses featuring sufficient flatness achieved for the field number up to 22. Use the BD series for the purpose of brightfield/darkfield observation.

 


SLMPLN Series

The risk of damaging a specimen under observation can be reduced thanks to the long working distance. The high-contrast, color blur-free image allows even the observation of the width of a fine line.

 


LCPLFLN-LCD Series

This is a series of objective lenses most suited for the observation of a specimen through glass substrates such as LCD panels. Corrections for aberrations are available according to the thickness of glass substrate thanks to a correction ring adopted.

 


Inspection-efficiency-conscious Design

 

Major Controls Concentrated on the Front Panel

 

Adjustment of opening/closing the aperture stop (AP) that plays an important roll in determining the contrast is possible with a single button operation in synchronization with the switching of the objective lens and observation mode. Still more, the light adjusting knob is arranged on the front panel so it can be manipulated with a single finger. This contributes to the speed-up of inspection. The objective lens and the aperture stop (AS) button are obliquely arranged to each other, allowing easy operation with only the thumb without releasing the focusing knob. This oblique button layout will enhance the sensitivity of fingertip and prevent wrong operation.

 

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Front Panel

 


Titling Lens Tube Instantly Adjustable to an Observation Posture

 

Adjusting the chair height according to your eye point or performing inspection in an unnatural posture would adversely affect the inspection efficiency with significant loss of time and reduce the speed of operation. Equipped with the tilting lens tube featuring a wide titling range from 0 to 42 degrees (adjustable height of 150mm, corresponding to SEMI S8), this model allows a comfortable, even an upright observation posture irrespective of the inspector’s physical structure. Also, the lens tube has a long distance between the observation center axis and the eye point, allowing ease of operation even with a large stage.

 

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Tilting Lens Tube

 


Transfer of a Wafer to a Stage Safely and Swiftly

The MX61L that can be combined with a wafer loader is designed small in footprint when combined. Rear macro inspection and micro inspection can be made safely and speedily without the use of tweezers. In addition, preliminary setup of wafer cassettes is easy. Using the optional remote control box, the user can start wafer transfer with the wafer loader, store a wafer in the cassette, and register a defective wafer, if any, on hand.

 

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AL120 Wafer Handler and MX61L Semiconductor Inspection Microscope

 


Varieties of Functions Supporting Fault Detection

 

Enhanced Inspection Speed with Speedy Objective Lens Switching

 

Motorized revolver switching speed has been enhanced by 20% over the conventional one. Objective lens switching is performed instantly with button operation, enhancing the inspection speed. A revolving nosepiece is selectable from three clean types as appropriate to the requirements. Further in the case of UIS2 objective lenses, eccentricity accuracy has been greatly improved at higher magnifications. Even with a CCD camera with a small size image sensor, no deviation will take place about the center of the view field at the time of magnification switching.

 

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Motorized Revolving Nosepiece

 


Aperture Stop (AS) Adjustment Complete upon the Change of Objective Lens

 

Aperture stop (AS) adjustment, if required each time the objective lens is changed, will reduce the efficiency of inspection. With the MX61L, it is possible to set up observation method and AS (in 14 steps) as appropriate for each objective lens, allowing observation with optimum contrast just by switching the objective lens. The time conventionally required for AS adjustment each time the objective lens or observation method is switched is completely eliminated, resulting in improved throughput and reduced operator’s fatigue at the same time.

 

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AS Automatic Adjustment

 


High Sensitivity Stage Achieves Speedy Positioning

 

The MX-SIC1412R2 stage that supports 300mm wafer/17 inch panel in size has a large transmitted illumination range (284mm in Y-axis). In addition, since coarse/fine switching is possible by means of the stage-grip with built-in clutch, you can move the stage freely while looking into the microscope. This ensures speedy inspection.

 

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Stage-grip with Built-in Clutch

 


Accessories Supporting Diverse Observation Methods

 

Add-on Functions Available as Needed

 

Near-infrared Observation Unit

 

Varieties of units compatible with near-infrared are available, including objective lenses with corrections for aberrations from visible light to near-infrared and ultra-wide view field trinocular observation tube compatible with near-infrared. They are of great help for observation of wafer-bump junction.

 

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Near-infrared Components

 

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Near-infrared Observation

 


Fluorescence Observation Unit

 

Fluorescence observation can be implemented by adding a mirror unit to the slider. A mirror unit that is compatible with U, B, and G excitation is available for effective inspection and analysis of organic EL and residual resist.

 

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Fluorescence Mirror Unit

 

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Fluorescence Observation

 


Transmitted Illumination Unit

 

Transmitted illumination units that support photo-mask or FPD inspection are available. Transmitted simple polarized observation is possible with the attachment of a polarizer. Two types are available, the universal type A and high NA (numerical aperture) type B.

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Transmitted Illumination Unit

 


Recording and storage of digital images is possible with a Digital Camera.

 

A digital camera can be attached to the trinocular tube. This allows recording and storage of digital images, facilitating report generation. Digital cameras are selectable as appropriate according to the application in terms of image quality, functions, and operability.


 

Semiconductor/FPD Inspection Microscope MX61 Specifications
Optical System UIS2 Optical System (Infinity-corrected)
Microscope Frame Observation Method BF/DF/DIC/KPO*/FL
Reflected/Transmitted Reflected/Transmitted
Illuminator Microscope Frame All-in-one (BF, DF + 1 Option)
Illumination System Reflected Light 100 W Halogen/100 W Mercury/75 W Xenon
Transmitted Light Fiber Light Guide
Focus Motorized/Manual Manual
Stroke 32 mm
Resolution/Fine Adjustment Sensitivity Fine Stroke per Rotation 0.1 mm
Maximum Specimen Height 30 mm
Revolving Nosepiece Motorized Type Sextuple for BF/DIC
Quintuple for BF/DF/DIC
Centarable Quintuple for BF/DF/DIC
Sextuple for BF/DF/DIC
Manual Type -
Stage Stroke 8×8 inch Right Handle Stage: 210(X)x210(Y)mm (Transmitted Light Range 189×189 mm)
6×6 inch Right Handle Stage: 158(X)x158(Y)mm
Observation Tube Widefield (Field Number 22) Inverted Image Binocular/Trinocular Observation Tube
Erect Image Trinocular Observation Tube
Super Wide Field (Field Number 26.5) Inverted Image Trinocular Observation Tube
Erect Image Tilting Trinocular Observation Tube
Option Unit DUV Unit/IR Unit/Motorized Stage/Wafer Loader
Dimensions 509(W)x843(D)x507(H)mm (in Standard Combination)
Weight 40 kg (in Standard Combination)
Remark *Simple Polarized Light Observation

 

Semiconductor/FPD Inspection Microscope MX61L Specifications
Optical System UIS2 Optical System (Infinity-corrected)
Microscope Frame Observation Method BF/DF/DIC/KPO*/FL
Reflected/Transmitted Reflected/Transmitted
Illuminator Microscope Frame All-in-one (BF, DF + 1 Option)
Illumination System Reflected Light 100 W Halogen/100 W Mercury/75 W Xenon
Transmitted Light Fiber Light Guide
Focus Motorized/Manual Manual
Stroke 32 mm
Resolution/Fine Adjustment Sensitivity Fine Stroke per Rotation 0.1 mm
Maximum Specimen Height 30 mm
Revolving Nosepiece Motorized Type Sextuple for BF/DIC
Quintuple for BF/DF/DIC
Centarable Quintuple for BF/DF/DIC
Sextuple for BF/DF/DIC
Manual Type -
Stage Stroke 14×12 inch Right Handle Stage: 356(X)x305(Y)mm (Transmitted Light Range 356×284 mm)
Observation Tube Widefield (Field Number 22) Inverted Image Binocular/Trinocular Observation Tube
Erect Image Trinocular Observation Tube
Super Wide Field (Field Number 26.5) Inverted Image Trinocular Observation Tube
Erect Image Tilting Trinocular Observation Tube
Option Unit DUV Unit/IR Unit/Motorized Stage/Wafer Loader
Dimensions 710(W)x843(D)x507(H)mm (in Standard Combination)
Weight 51 kg (in Standard Combination)
Remark *Simple Polarized Light Observation

 

The MX61L/ MX61, 300 mm/ 200 mm semiconductor inspection microscope provides exceptional image resolution and clarity through observation methods such as brightfield, darkfield, differential interference contrast (DIC), fluorescence and infrared.